AMAYA

AMAYA - APCVD

Features
Current hot products – AMAX800V (8”) and MAX1200 (12”) AP-CVD equipment
Applicable to different machine models for SiO2, BPSG, BSG, PSG and AlOx films.
Film disposition process can be performed at the temperature ranging from 200°C to 500°C.
Sale of machine parts.
On-site machine repair service.
Machine software/hardware upgrade service.

Description

Atmospheric Chemical Vapor Deposition (AP-CVD) equipment is widely used in semiconductors and solar cells.

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