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AMAYA
AMAYA - APCVD
- Features
- Current hot products – AMAX800V (8”) and MAX1200 (12”) AP-CVD equipment
- Applicable to different machine models for SiO2, BPSG, BSG, PSG and AlOx films.
- Film disposition process can be performed at the temperature ranging from 200°C to 500°C.
- Sale of machine parts.
- On-site machine repair service.
- Machine software/hardware upgrade service.
Description
Atmospheric Chemical Vapor Deposition (AP-CVD) equipment is widely used in semiconductors and solar cells.More introduction