Maintenance Service
- Home
- MAINTENANCE SERVICE
- Service
CHILLER
- Features
- SMC THERMO CON Chiller、
- MPC Chiller (for Advantest)、
- SHINWA Chiller 、RISSHI Chiller、
- AQUA Chiller、ATS Chiller、NESLAB Chiller
- For other models, please contact the sales staff of Business Department 2
Description
Our company is the agent of Japan's MPC and SMC chiller. We have extensive repair experience and performance for chillers of various brands used in semiconductor and LCD processes.
Power Supply HV-PS8 HV PS4
- Features
- E-Chuck available for electrostatic adhesion for wafers
- Machine：TEL Vigus application
- Customer group：TSMC & UMC
Description
TSMC certified supplier since 2020Repair of semiconductor Kyosan Power Supply PS8 & PS4
Equipment used for testing：
CKD Valve
- Features
- Please contact the sales staff of Business Department 2.
Description
Applied to EBARA CMP machine, maintenance and adjustment, customer group: TSMC
VALVE
- Features
- Valve：Pendulum Valve、Butterfly Valve、Gate Valve、Angle Valve、APC Valve
- Brand：VAT, SMC, NC, MDC, MKS, CKD, etc.
Description
Our company provides related maintenance services for all brands and types of valves used in vacuum systems. To improve maintenance quality, all valve assembly is performed in a clean room. In addition to general action tests and He leak tests, the post-repair inspection also includes related fixtures (MFC & PUMP & cavity) for valves used for pressure control, and actual pressure control tests are performed after repair to reduce the probability of problems occurring again after the machine is put into use.
ROBOT
- Features
- MHI ROBOT
- DAIHEN ROBOT
- JEL ROBOT
Description
Robot O/H.
Robot repair.
Robot teaching.
Precision adjustment and testing after robot assembly.
Electrode Regeneration Technique
Description
Ceramic Coating
As shown in the picture, plasma spray is a thermal phenomenon produced after ionization of the gas (argon, hydrogen, nitrogen, helium). In other words, it is a phenomenon of conversion from electrical energy to heat energy. The arc temperature in the central area may reach up to 12,000°C. After formation of the arc, the powder is put in the center of the flame. It is molten and impacts the surface of the workpiece (base material) at a speed of 300 meters/sec. to form a coating.
Lower electrode, upper electrode, chamber shield
Panel industry: G4.5–G10
Material: AL2O3/Y2O3
