YAC - Anneal

Features: Current application in Taiwan – YHR series RTA furnace.; The machine is applicable to amorphous silicon film and μ-C membrane crystallization (SPC) engineering.; Rapid temperature rise/drop control: 4°C per second (rise) and 1°C per second (drop).; Sale of machine parts.; On-site machine repair service.; Machine software/hardware upgrade service.

The Rapid Thermal Annealing (RTA) furnace is the equipment required for the panel manufacturer to produce quality LTPS.

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