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- YAC - Dry Etcher
YAC
YAC - Dry Etcher
- Features
- Current mass production in Taiwan – G3.5/G4/G4.5/G5/G5.5/G6/G7.5/G8.6 dry etchers.
- Sale of machine parts.
- Parts repair service – RF Generator, Matching Box, Chiller, Gate Valve, Chiller, Vacuum Robot.
- On-site machine repair service.
- Machine software/hardware upgrade.