YAC

YAC - Dry Etcher

Features
Current mass production in Taiwan – G3.5/G4/G4.5/G5/G5.5/G6/G7.5/G8.6 dry etchers.
Sale of machine parts.
Parts repair service – RF Generator, Matching Box, Chiller, Gate Valve, Chiller, Vacuum Robot.
On-site machine repair service.
Machine software/hardware upgrade.

Description

Dry Etcher is widely applicable to TFT LCD and LTPS front-end process.
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